AVS 58th Annual International Symposium and Exhibition
    Plasma Science and Technology Division Monday Sessions
       Session PS+BI-MoA

Paper PS+BI-MoA6
Pulsed Plasma Studies of 2-chloro-p-xylene

Monday, October 31, 2011, 3:40 pm, Room 202

Session: Multiphase (Liquid, Solid, Gas) and Biological Related Plasmas
Presenter: Isabel Estrada-Raygoza, University of Texas at Dallas
Authors: I.C. Estrada-Raygoza, University of Texas at Dallas
G. Padron-Wells, University of Texas at Dallas
P.L.S. Thamban, University of Texas at Dallas
L.J. Overzet, University of Texas at Dallas
M.J. Goeckner, University of Texas at Dallas
Correspondent: Click to Email
Chemical vapor deposited parylene-C is widely used for applications ranging from biomedicine to microelectronics. In our work, we use 2-chloro-p-xylene (2ClpX) as a precursor to deposit plasma polymerized Parylene C. Here we report data aimed at determining the dissociacion mechanisms of the 2ClpX in the plasma. Specifically that data is from: in situ Fourier transform infrared spectroscopy (FTIR); plasma optical emission spectroscopy (OES); and electron beam OES. The main dissociation products are HCl, methane and acetylene. We also observe atomic and molecular hydrogen and chlorine, HCl ion, CH and the characteristic broad aromatic band in the 300 nm region. Both frequency and duty cycle have a strong effect in 2ClpX dissociation. When the pulse period is smaller than the diffusion time, the discharge behaves as continuos wave system, independent of the duty cycle used. When the pulse period is much larger than the diffusion time, the discharge behaves different and very little break up of the monomer is detected. When the pulse period is similar to the diffusion time, then the effect of duty cycle is considerable. This work is supported in part by NSF (Grant CBET- 0922962), Verity Instruments and CONACYT Grant 170201.