AVS 58th Annual International Symposium and Exhibition
    Nanomanufacturing Science and Technology Focus Topic Tuesday Sessions
       Session NM-TuP

Paper NM-TuP4
Fabrication of Double Nanohoneycombs (Pt/ZnO) with Controllable Size using Nanosphere Lithography and Plasma Enhanced Atomic Layer Deposition

Tuesday, November 1, 2011, 6:00 pm, Room East Exhibit Hall

Session: Nanomanufacturing Science and Technology Poster Session
Presenter: Wen-Hao Cho, National Applied Research Laboratories, Taiwan, Republic of China
Authors: C.-T. Lee, National Applied Research Laboratories, Taiwan, Republic of China
W.-H. Cho, National Applied Research Laboratories, Taiwan, Republic of China
B.H. Liu, National Applied Research Laboratories, Taiwan, Republic of China
C.C. Kei, National Applied Research Laboratories, Taiwan, Republic of China
D.P. Tsai, National Applied Research Laboratories, Taiwan, Republic of China
Correspondent: Click to Email
The double nanohoneycombs (Pt/ZnO) on glass and Si substrates were fabricated by nanosphere lithography (NSL) and plasma enhanced atomic layer deposition (PEALD). The first nanohoneycomb (ZnO) was fabricated by controllable size with NSL and magnetron sputtering. In this study, platinum thin films were deposited on ZnO nanohoneycomb by using PEALD using MeCpPtMe3 and oxygen plasma as precursors. The effects of the thickness of platinum thin films on the structural and optical properties of the double nanohoneycombs (Pt/ZnO) were investigated by field emission scanning electron microscopy, X-ray diffraction and spectrometer. X-ray diffraction analysis revealed that the platinum thin films are polycrystalline with a preferred orientation along (111). This technique forming double nanohoneycombs, especially with desired period, is expected to be a candidate for wide nanostructure applications such as field emission, sensors, etc.