| AVS 58th Annual International Symposium and Exhibition | |
| MEMS and NEMS Group | Thursday Sessions |
| Session MN-ThA |
| Session: | Multi-scale Interactions of Materials and Fabrication at the Micro- and Nano-scale |
| Presenter: | Daniel Joe, Cornell University |
| Authors: | D.J. Joe, Cornell University Y. Linzon, Cornell University V.P. Adiga, Cornell University R.A. Barton, Cornell University M. Kim, Cornell University B. Ilic, Cornell University S. Krylov, Tel Aviv University, Israel J.M. Parpia, Cornell University H.G. Craighead, Cornell University |
| Correspondent: | Click to Email |
In this work we demonstrate robust flammable gas sensing using stress-based resonant microelectromechanical systems (MEMS) bridges at ambient pressure and temperature. In contrast to previously reported works, which were based on either measuring a static deflection or changes in frequency due to added mass, we report a method of tracking shifts in resonant frequency of microbridges in real time due to alteration of stress from swelling of a reactive polymer coating near the Euler buckling configuration. Experimental results clearly demonstrate that the suggested approach is efficient for selectively sensing trace vapor. We show projected vapor content sensitivity as low as ~13.4 ppm for ethanol vapor in low concentration regime, and demonstrate actualized proven sensitivity of less than 1 part per thousand, with a few seconds response time for the functionalized microbridge.