| AVS 58th Annual International Symposium and Exhibition | |
| MEMS and NEMS Group | Thursday Sessions |
| Session MN-ThA |
| Session: | Multi-scale Interactions of Materials and Fabrication at the Micro- and Nano-scale |
| Presenter: | Robert Barton, Cornell University |
| Authors: | R.A. Barton, Cornell University A.M. van der Zande, Cornell University R.B. Ilic, Cornell University C.S. Ruiz-Vargas, Cornell University J.S. Alden, Cornell University W.S. Whitney, Cornell University J. Park, Cornell University P.L. McEuen, Cornell University J.M. Parpia, Cornell University H.G. Craighead, Cornell University |
| Correspondent: | Click to Email |
Graphene’s unparalleled strength, stiffness, and low mass per unit area make it an ideal material for nanoelectromechanical systems (NEMS), but graphene resonators have been challenging to fabricate in large numbers and have exhibited poor quality factor. Here, we present simple methods of fabricating large arrays of graphene resonators from CVD-grown graphene and discuss their properties. We focus on circular graphene resonators with diameter of up to 30 microns, for which we observe highly reproducible resonance frequencies and mode shapes, as well as a striking improvement in the membrane quality factor with increasing size. The largest graphene resonators display quality factors as high as 2400 ± 300, about an order of magnitude greater than previously observed quality factors for monolayer graphene. These measurements shed light on the mechanisms behind dissipation in monolayer graphene resonators and demonstrate that the quality factor of graphene resonators relative to their thickness is high compared to nanomechanical resonators demonstrated to date. We conclude by providing an outlook for graphene NEMS and their applications.