AVS 58th Annual International Symposium and Exhibition | |
Helium Ion Microscopy Focus Topic | Tuesday Sessions |
Session HI-TuP |
Session: | Aspects of Helium Ion Microscopy Poster Session |
Presenter: | Adam Hall, University of North Carolina Greensboro |
Authors: | A.R. Hall, University of North Carolina Greensboro J. Yang, Carl Zeiss NTS D. Ferranti, Carl Zeiss NTS L.A. Stern, Carl Zeiss NTS J. Huang, Carl Zeiss NTS J.A. Notte, Carl Zeiss NTS |
Correspondent: | Click to Email |
We report the formation of solid-state nanopores using the highly focused ion beam and lithographic capabilities of a scanning Helium Ion Microscope (HIM). We will discuss several aspects of the fabrication process, offering the advantage of high sample throughput along with fine control over nanopore dimensions. We will compare characteristics of the resultant devices with those made by the established technique of transmission electron microscope milling and demonstrate the utility of our nanopores for biomolecular analysis.