AVS 58th Annual International Symposium and Exhibition
    Helium Ion Microscopy Focus Topic Tuesday Sessions
       Session HI-TuP

Paper HI-TuP2
Helium Ion Microscope (HIM) Milling of Solid-State Nanopores for Single-Molecule Detection Devices

Tuesday, November 1, 2011, 6:00 pm, Room East Exhibit Hall

Session: Aspects of Helium Ion Microscopy Poster Session
Presenter: Adam Hall, University of North Carolina Greensboro
Authors: A.R. Hall, University of North Carolina Greensboro
J. Yang, Carl Zeiss NTS
D. Ferranti, Carl Zeiss NTS
L.A. Stern, Carl Zeiss NTS
J. Huang, Carl Zeiss NTS
J.A. Notte, Carl Zeiss NTS
Correspondent: Click to Email

We report the formation of solid-state nanopores using the highly focused ion beam and lithographic capabilities of a scanning Helium Ion Microscope (HIM). We will discuss several aspects of the fabrication process, offering the advantage of high sample throughput along with fine control over nanopore dimensions. We will compare characteristics of the resultant devices with those made by the established technique of transmission electron microscope milling and demonstrate the utility of our nanopores for biomolecular analysis.