AVS 58th Annual International Symposium and Exhibition
    Exhibitor Technology Spotlight Wednesday Sessions
       Session EW-WeL

Paper EW-WeL3
Combining NEG and Sputter Ion Pump Technologies to Meet the Challenges of UHV-XHV Systems

Wednesday, November 2, 2011, 12:40 pm, Room West Exhibit Hall

Session: Exhibitor Technology Spotlight
Presenter: Bob Garcia, SAES Getters
Authors: B. Garcia, SAES Getters
F. Siviero, SAES Getters
A. Conte, SAES Getters
L. Viale, SAES Getters
A. Bonucci, SAES Getters
P. Manini, SAES Getters
L. Caruso, SAES Getters
A. Cadoppi, SAES Getters
Correspondent: Click to Email
Current UHV and XHV vacuum technology requires better vacuum, lower power consumption and smaller components. The NEXTorr pumping system meets these requirements by providing large pumping, good gas capacity. low power consumption and vibration free pumping in an unprecedented small size. Specifications and data will be presented to discus advantages of the NEXTorr pumping system.