| AVS 57th International Symposium & Exhibition | |
| Thin Film | Tuesday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 8:00am | TF1-TuM1 Invited Paper Feasibility of Wrinkle Free Graphene Process B.H. Lee, C.H. Cho, S.K. Lim, S.Y. Lee, H.J. Hwang, Y.-G. Lee, U.J. Jung, C.G. Kang, Gwangju Institute of Science and Technology, Korea |
| 8:40am | TF1-TuM3 The Effects of Interfacial Organic Layers on the Growth of Thin Al2O3, HfO2 and TaNx Films by Atomic Layer Deposition K.J. Hughes, S. Issacson, J.R. Engstrom, Cornell University |
| 9:00am | TF1-TuM4 Property of Interfacial Layer Induced VFB Shift in Al-related Gate Oxide Deposited by Remote Plasma Atomic Layer Deposition H.T. Jeon, H. Kim, S. Woo, J. Lee, H. Lee, Hanyang University, Republic of Korea |
| 9:20am | TF1-TuM5 Atomic Layer Deposited Pb(Zr,Ti)Ox Films Composited as Ferroelectric and Multiferroic Materials F. Zhang, T.E. Quickel, Y.-C. Perng, S. Tolbert, J.P. Chang, University of California, Los Angeles |
| 9:40am | TF1-TuM6 Y2O3 Atomic Layer Deposition from a Novel Process and its Integration in a Gate First Approach for 0.8 nm Equivalent Oxide Thickness C. Dubourdieu, CNRS and IBM Research, M.M. Frank, E. Cartier, J. Bruley, S.M. Rossnagel, IBM T.J. Watson Research Center, A. Kellock, IBM Almaden Research Center, V. Narayanan, IBM T.J. Watson Research Center |
| 10:40am | TF1-TuM9 Direct Liquid Injection Chemical Vapor Deposition of Nickel Ferrite and Barium Titanate Thin Films N. Li, A. Wang, A. Gupta, T.M. Klein, University of Alabama |
| 11:00am | TF1-TuM10 Structure-Property Relationship in high-k, ALD Al-doped TiO2 Films using Raman Spectroscopy L.C. Haspert, P. Banerjee, L. Henn-Lecordier, G.W. Rubloff, University of Maryland |
| 11:20am | TF1-TuM11 In-situ XPS and Half-Cycle Studies of Atomic Layer Deposited Al2O3 on Group-III Nitride Substrate for MOS-HEMT Applications P. Sivasubramani, T.J. Park, B.E. Coss, S. McDonnell, R.M. Wallace, J. Kim, University of Texas at Dallas, Y. Cao, D. Jena, H. Xing, University of Notre Dame |
| 11:40am | TF1-TuM12 Defect Mechanisms for Chlorosilane Based Self-Assembled Monolayers S. Miller, A.J. Muscat, University of Arizona |