AVS 57th International Symposium & Exhibition | |
Vacuum Technology | Tuesday Sessions |
Session VT+MS-TuM |
Session: | Outgassing, Contamination Control, and Process Modeling |
Presenter: | R.F. Berg, National Institute of Standards and Technology |
Correspondent: | Click to Email |
In a closed vacuum chamber, the problem of hydrogen outgassing from stainless steel increases with both the temperature and the chamber’s surface-to-volume ratio. This talk will describe the outgassing in a chamber that is used to measure the vapor pressures of organic compounds in the range from 1 Pa to 100 kPa. The chamber, which is a small manifold built from stainless steel fittings and two capacitance diaphragm gauges, has a combination of challenges not usually present in a larger apparatus at room temperature. (1) Its volume of only 29 cm3 created a relatively large surface-to-volume ratio. (2) Operating at temperatures as high as 200 °C greatly increased the outgassing rate. (3) The pressure gauges limited the maximum allowed bakeout temperature.
Closing the valve to the vacuum pump caused the pressure to increase nonlinearly with time. The initial rate slowed during several hours and usually became linear with time within one day. Intermittent pumping during one month at 200 °C showed that the linear rate decreased with an exponential time constant of approximately 11 days, which was consistent with the diffusion of hydrogen from the stainless steel fittings. Understanding this behavior is important because a pressure increase of 1 Pa/day (3 x 10-10 Pa m3/s) can cause a significant error in the vapor pressure measurement. A model that accounts for the diffusion of hydrogen in the chamber wall and its nonlinear accumulation in the chamber volume will be compared to the pressure measurements.