AVS 57th International Symposium & Exhibition
    Tribology Focus Topic Thursday Sessions
       Session TR-ThP

Paper TR-ThP2
Deposition and Characterization of TiAlN/WN Multilayer Thin Films Deposited by dc Magnetron Sputtering

Thursday, October 21, 2010, 6:00 pm, Room Southwest Exhibit Hall

Session: Tribology Focus Session Poster Session
Presenter: O. Jimenez-Aleman, Universidad de Guadalajara, Mexico
Authors: O. Jimenez-Aleman, Universidad de Guadalajara, Mexico
J. Garcia, Universidad de Guadalajara, Mexico
L. Huerta, Universidad Nacional Autonoma de Mexico
M. Flores, Universidad de Guadalajara, Mexico
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TiAlN/WN multilayer thin films with a range of different compositions and number of layers were deposited by PVD magnetron sputtering onto a variety of metallic substrates in a mixture of Ar/N2 atmospheres. The utilisation of different nitride-formers elements and nitrogen (as a reactive gas) allows the deposition of alternative coatings with improved properties (e.g. wear and corrosion resistance) to those observed in individual commercial nitrides. The structure and morphology of the coatings were studied by means of X-ray Diffraction and Scanning Electron Microscopy. The elemental compositions and the surface chemistry (to gain precise information on the bonding environment) of these coatings were obtained by XPS. Microhardness and scratch tests were used to evaluate the mechanical properties and the adhesion of TiAlN/WN thin films respectively. The corrosion resistance was studied by potentiodynamic polarisation experiments in saline solutions of 0.5 M. The tribological properties were studied through reciprocating sliding against ceramic counterparts and different loads. In this paper we report the results relating to the influence of deposition conditions such as deposition temperature, period size and nitrogen content on coating properties. The improvement of corrosion and wear resistance by the utilisation of a multilayered TiAlN/WN arrangement is also presented and discussed.