| AVS 57th International Symposium & Exhibition | |
| Surface Science | Tuesday Sessions |
| Session SS-TuP |
| Session: | Surface Science Poster Session |
| Presenter: | S. Alnabulsi, Physical Electronics |
| Authors: | S. Alnabulsi, Physical Electronics J.F. Moulder, Physical Electronics R. Barbey, Ecole Polytechnique Fédérale de Lausanne, Switzerland H.A. Klok, Ecole Polytechnique Fédérale de Lausanne, Switzerland |
| Correspondent: | Click to Email |
The application of XPS C60 sputter depth profiling to characterize synthesized poly-glycidyl methacrylate (PGMA) brush-like thin film structures will be presented. In contrast to low voltage (250 V) Ar sputtering, C60 sputtering with XPS analysis was able to obtain quantitative chemical state information as a function of depth with minimal ion beam induced chemical damage. To minimize sputtering artifacts and improve interface definition, Zalar (azimuthal) rotation and appropriate instrument geometry for C60 sputter depth profiling was used for this work. The XPS depth profiles show the chemical changes associated with various solutions applied to these organic films.