AVS 56th International Symposium & Exhibition
    Vacuum Technology Monday Sessions

Session VT-MoM
Vacuum Contamination and Pumping

Monday, November 9, 2009, 8:20 am, Room C1
Moderator: M. Wüest, INFICON Ltd., Liechtenstein


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  in Adobe Acrobat format  

Click a paper to see the details. Presenters are shown in bold type.

8:20am VT-MoM1 Invited Paper
Silicon-based Surface Treatments for Improved Vacuum System Throughput, Inertness, and Corrosion Resistance
D.A. Smith, SilcoTek Corporation, B.R.F. Kendall, Elvac Associates
9:00am VT-MoM3
Modeling Decontamination of Vacuum Chambers by Downstream Plasma Cleaning
C.G. Morgan, R. Vane, XEI Scientific, Inc.
9:20am VT-MoM4
Methods for Measuring Outgassing for Qualification of Materials, Components and Systems
N.B. Koster, R. Koops, E. van Zeijl, TNO Science and Industry, Netherlands
9:40am VT-MoM5
Outgassing Characterization of Elastomeric Seals Used in Semiconductor Wafer Processing
M. Heller, S. Sogo, J. Chen, J. Legare, DuPont Performance Elastomers L.L.C.
10:00am VT-MoM6
Permeation Through Elastomers: Comparison of Viton® and Chemraz® 653 O-rings under Controlled Compression and Temperature
N.T. Peacock, MKS Instruments, HPS Products
10:40am VT-MoM8
Controlled Formation of Condensed Frost Layers in Cryogenic High Vacuum Pumps
S.E. Syssoev, A.J. Bartlett, M.J. Eacobacci, Brooks Automation Inc.
11:00am VT-MoM9
Combination of Compact NEG and Small Ion Pumps for UHV Systems
P. Manini, SAES Getters, Italy, C.D. Park, S.M. Chung, Pohang Accelerator Laboratory, South Korea
11:20am VT-MoM10
Water Vapor Cryopumping: Refrigerant Phaseout Compliance
K. Flynn, C. Rebecchi, Brooks Automation Polycold Systems
11:40am VT-MoM11
Vacuum Processing for the 21st Century
S. Ormrod, N. Schofield, Edwards Ltd, UK