AVS 56th International Symposium & Exhibition
    Thin Film Wednesday Sessions

Session TF-WeA
ALD/CVD: Novel Applications, Mechanical Properties

Wednesday, November 11, 2009, 2:00 pm, Room B4
Moderator: N.P. Guisinger, Argonne National Laboratory


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  in Adobe Acrobat format  

Click a paper to see the details. Presenters are shown in bold type.

2:00pm TF-WeA1
ALD Applications to DNA Sequencing, Electrolytic Junctions and Nanofluidics
S.M. Rossnagel, S.-W. Nam, IBM T.J. Watson Research Center
2:20pm TF-WeA2
Fabrication and Characterization of Point Contact Metal-Insulator-Metal Diodes for Potential Applications in Energy Harvesting
P. Periasamy, Colorado School of Mines, A. Dameron, J. Bergeson, J. Berry, P. Parilla, D.S. Ginley, National Renewable Energy Laboratory, R. O'Hayre, Colorado School of Mines
2:40pm TF-WeA3
Tungsten Oxide (WO3) Thin Films for Application in Advanced Energy Systems
S.K. Gullapalli, C.V. Ramana, University of Texas at El Paso
3:00pm TF-WeA4
Growth Kinetics in a Large-Bore Vertically-Aligned Carbon Nanotube Film CVD Process
K. Bosnick, L. Dai, National Research Council Canada
4:00pm TF-WeA7
Study of Silicon Strain in Shallow Trench Isolation
M. Belyansky, N. Klymko, D. Chidambarrao, R. Conti, F. Liu, IBM
4:20pm TF-WeA8
Critical Compressive Stress for Cracking of Al2O3 ALD Films
S.H. Jen, J.A. Bertrand, S.M. George, University of Colorado
4:40pm TF-WeA9
Elaboration of Dichroic Filters on Shape Memory Substrate
O. Carton, M. Lejeune, A. Zeinert, Laboratoire de Physique de la Matière Condensée, France, S. Zaidi, F. Lamarque, Laboratoire Roberval, France
5:00pm TF-WeA10
Single-Stage Deposition of Organic/Inorganic Multilayer by Plasma Enhanced and Initiated Chemical Vapor Deposition
A.M. Coclite, University of Bari, Italy, G. Ozaydin-Ince, Massachusetts Institute of Technology, F. Palumbo, R. d'Agostino, University of Bari, Italy, K. Gleason, Massachusetts Institute of Technology
5:20pm TF-WeA11
The Role of Ammonia as an Inhibitor Species in Low Temperature CVD to Reduce Film Growth Rate and Enhance Conformal Coverage
S. Babar, P. Zhang, W. Wang, N. Kumar, J.R. Abelson, University of Illinois, Urbana-Champaign
5:40pm TF-WeA12
Nanoscale Engineering of Ceramic Supports for High Permeance Ultrafiltration Membranes
R. Nahm, P.C. Rowlette, C.A. Wolden, Colorado School of Mines