| AVS 56th International Symposium & Exhibition | |
| MEMS and NEMS | Thursday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 2:00pm | MN+IJ+TR-ThA1 Invited Paper Silicon Carbide Thin Film Technology for Microsystems in Harsh Environments C. Carraro, University of California, Berkeley |
| 2:40pm | MN+IJ+TR-ThA3 Sidewall Tribometer and Quartz Crystal Microbalance Study of a Self-Assembled Monolayer Lubricant Reservoir Effect D.A. Hook, B.P. Miller, North Carolina State University, M.T. Dugger, Sandia National Laboratories, J. Krim, North Carolina State University |
| 3:00pm | MN+IJ+TR-ThA4 In situ Reliability Studies of Interfacial Contact via a 2-axis MEMS Deflecting Cantilever Microinstrument F. Liu, I. Laboriante, C. Carraro, R. Maboudian, University of California, Berkeley |
| 4:20pm | MN+IJ+TR-ThA8 Traceable Determination of Cantilever Spring Constants with a MEMS-based Sensor T. Dziomba, S. Gao, U. Brand, K. Herrmann, L. Koenders, Physikalisch-Technische Bundesanstalt (PTB), Germany |
| 4:40pm | MN+IJ+TR-ThA9 Improvement in Mechanical Contact Reliability with ALD TiO2 Coating V. Pott, H. Kam, J. Jeon, T.-J. King Liu, UC Berkeley |
| 5:00pm | MN+IJ+TR-ThA10 Mass Producable, Multiple Stack, Integrated Micro Gas Chromatography System K. Stacey, A. Knobloch, N. Chen, GE Global Research, W.C. Tian, National Taiwan University, M. Shannon, R. Masel, University of Illinois at Urbana-Champaign |