AVS 56th International Symposium & Exhibition
    Thin Film Tuesday Sessions
       Session TF2-TuA

Paper TF2-TuA9
Molecular Layer Deposition of "Sugarcone" Hybrid Organic-Inorganic Films Using Saccharides and Metal Precursors

Tuesday, November 10, 2009, 4:40 pm, Room B4

Session: ALD/CVD: Oxides and Barriers
Presenter: B. Yoon, University of Colorado at Boulder
Authors: B. Yoon, University of Colorado at Boulder
R. Hall, University of Colorado at Boulder
D. Seghete, University of Colorado at Boulder
A.S. Cavanagh, University of Colorado at Boulder
S.M. George, University of Colorado at Boulder
Correspondent: Click to Email
Molecular layer deposition (MLD) of hybrid organic-inorganic polymers is based on the sequential, self-limiting reactions of organic and inorganic reactants. Alucone MLD has been reported based on the reaction between trimethylaluminum (TMA) and ethylene glycol (EG). Zincone MLD has also been demonstrated using diethylzinc and EG as the reactants. In this study, a new class of hybrid organic-inorganic films that can be called “sugarcone” was fabricated based on the reaction between saccharides and metal reactants. This strategy was demonstrated using sucrose and TMA. The sugarcone MLD film growth was monitored using in situ transmission FTIR analysis. The FTIR spectra revealed that TMA reacts with hydroxyl groups and deposits AlCH3* species. The sucrose then reacts with the AlCH3* species and deposits an organic moiety with available hydroxyl groups. Both the TMA and sucrose sequential reactions were self-limiting. Sequential exposures of TMA and sucrose led to the linear growth of the sugarcone film. X-ray reflectivity measurements were consistent with a growth rate of ~ 2.0 Å per cycle based on 300 MLD cycles on a Si wafer at 150oC. The TEM images of sugarcone films on ZrO2 nanoparticles after 150 MLD cycles at 150oC were in agreement with a MLD growth rate of ~2.3 Å per cycle. The sugarcone films were not stable in air and oxidized by adsorbing H2O. This reaction may be useful in gas diffusion barriers because the sugarcone film could serve as a chemical getter to adsorb any H2O that diffuses through the barrier.