AVS 56th International Symposium & Exhibition
    Thin Film Tuesday Sessions
       Session TF2-TuA

Paper TF2-TuA11
Engineering Optical Properties by Controlling Concentration and Proximity of Rare Earth Dopants in an Y2O3 Host using Radical Enhanced ALD

Tuesday, November 10, 2009, 5:20 pm, Room B4

Session: ALD/CVD: Oxides and Barriers
Presenter: J. Hoang, University of California, Los Angeles
Authors: J. Hoang, University of California, Los Angeles
J. Chang, University of California, Los Angeles
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The realization of compact fiber optic networks is limited by the control of the rare earth (RE) dopant ion’s identity and its distribution. Each RE ion contains spectral energy levels, whose transitions can be promoted by controlling the ion-ion proximity. In this work, a radical enhanced atomic layer deposition (RE-ALD) process, utilizing highly reactive radicals to activate surface reactions, is developed to design complex metal oxides with multiple dopants, whose concentration variation and spatial distribution control enable the synthesis of a wide range of multifunctional materials with tunable properties including magnetic, spectral, and electronic. Specifically, the control of dopant proximity and concentration is used to enhance desirable spectral transitions related to amplification at 1.54 micron for compact planar optical amplifier applications. The spatial distributions between Er3+ and various rare earth sensitizers (e.g. Yb and Eu) are investigated. The ability to control the spacing of each sensitizer allows for a unique study of the correlation between energy transfer and dopant proximity. Thin films of approximately 10 nm are synthesized by sequential radical-enhanced ALD of Y2O3, Er2O3, Yb2O3, and Eu2O3 at about 350°C. The composition, microstructure, cation distribution, local chemical bonding and optical properties of the as-synthesized thin films were determined by x-ray photoelectron spectroscopy, electron microscopy and photoluminescence measurements. To optimize the effect of the sensitizer and minimize the concentration quenching, the concentration and spatial distance between Yb3+/Eu3+ sensitizers and Er3+ were controlled by changing the global deposition cycle sequence. Extended x-ray absorption fine structure analysis verified the spatial control of dopants in the Y2O3 host. It was found that multi-dopant spatial control allows for incorporation of minimal active sensitization sites, allowing for the possibility of maximizing the active Er concentration while maintaining efficient energy transfer. This additional degree of control allows for a class of complex materials that can potentially outperform their conventional counterparts by many-folds in luminescence.