AVS 56th International Symposium & Exhibition
    Thin Film Thursday Sessions
       Session TF-ThM

Paper TF-ThM5
Composite Nanoparticles Produced Using Plasma-Enhanced Chemical Vapor Deposition of SiO2 and Amine-Containing Films

Thursday, November 12, 2009, 9:20 am, Room B4

Session: Nanostructuring Thin Films II
Presenter: J.C. Shearer, Colorado State University
Authors: J.C. Shearer, Colorado State University
E.R. Fisher, Colorado State University
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TiO2 and Fe2O3 nanoparticles are of significant importance in both chemical and biological applications. TiO2 nanoparticles are used in paint, coatings, food, solar technology and many other areas. Fe2O3, as well as other magnetic nanoparticles, are used in the biomedical industry in drug delivery schemes as well as for magnetic resonance imaging contrast agents. Silica-coated TiO2 and Fe2O3 nanoparticles have distinct properties and enhanced functionality over those of uncoated nanoparticles. Plasma-enhanced chemical vapor deposition (PECVD) was employed to conformally coat TiO2 and Fe2O3 nanoparticles with SiOx and amine-containing films, thereby creating composite nanomaterials. Hexamethyldisiloxane (HMDSO)/O2 plasmas were used to create SiO2 and SiOxCyHz–coated nanoparticles and pulsed hexylamine (HexAm) plasmas were used to create amine-containing hydrocarbon materials, all of which were analyzed using Fourier-transform infrared spectroscopy (FTIR), x-ray photoelectron spectroscopy (XPS), scanning electron microscopy (SEM), and magnetic susceptibility. Films deposited on the nanomaterials showed little difference from those deposited on flat substrates. The performance of the TiO2 nanoparticles was tested using UV-vis spectroscopy to determine dispersion characteristics of SiOx-coated TiO2 materials, which can give information about the agglomeration of the nanoparticles in solution. Notably, the coated materials stay dispersed longer in polar solvents, suggesting the coated nanoparticles may be better suited for applications involving colloidal suspensions. Magnetic susceptibility characterized the magnetic properties of the Fe2O3 nanoparticles before and after film deposition. Comparison of the mechanical and chemical properties of different composite nanomaterials will be discussed along with the influence of film composition on performance.