AVS 56th International Symposium & Exhibition
    Thin Film Thursday Sessions
       Session TF-ThA

Paper TF-ThA6
Resonant Infrared Pulsed Laser Deposition of Organic Materials for Display Applications

Thursday, November 12, 2009, 3:40 pm, Room B4

Session: Next Generation Processing
Presenter: H.K. Park, AppliFlex LLC
Authors: H.K. Park, AppliFlex LLC
K.E. Schriver, Vanderbilt University
R.F. Haglund, Vanderbilt University
Correspondent: Click to Email

We report the resonant infrared pulsed laser deposition (RIR-PLD) technique for depositing novel, functional polymers, small organic molecules and nanoparticle-loaded polymers. Film deposition based on resonant infrared (RIR) laser ablation is enabled by resonant excitation of a localized, intra-monomer vibrational mode of the target material, such as a C-H stretch; this leads to low-temperature volatilization and deposition of undamaged small molecules, polymers and even nanoparticles. Because the mid-infrared photons used in this process have energies far below those required to break the bonds that connect monomer units, RIR laser irradiation ablates polymers without photofragmentation, unlike ultra-violet pulsed laser deposition (UV-PLD). In this paper, we will demonstrate successful RIR-PLD deposition of selected materials that are essential to organic light emitting diode (OLED) technology; (1) light emitting small-molecule and polymer materials such as Alq3 (Tris(8-hydroxyquinolinato)aluminium), MEH-PPV and conducting polymer PEDOT:PSS (Poly(3,4-ethylenedioxythiophene) poly(styrene sulfonate)); (2) polymeric barrier film such as cyclic olefin copolymer (COC) and Teflon®; and (3) nanocomposite materials based on TiO2 and metal nanoparticles that serve as brightness enhancement layers and transparent conducting electrodes.

The deposited films are characterized by SEM (scanning electron microscopy) and FTIR (Fourier-transform infrared spectroscopy), photo- and electroluminescence. We will also present the comparison of film properties as they depend on different mid-infrared laser choices, such as a picosecond, tunable free electron laser (FEL), Er;YAG laser and picosecond optical parametric oscillator (OPO).