| AVS 56th International Symposium & Exhibition | |
| Plasma Science and Technology | Thursday Sessions |
| Session PS-ThP |
| Session: | Plasma Science Poster Session |
| Presenter: | T. Michna, Phive Plasma Technologies, Ireland |
| Authors: | A.R. Ellingboe, Dublin City University, Ireland T. Michna, Phive Plasma Technologies, Ireland |
| Correspondent: | Click to Email |
A novel divide by arbitrary-N power divider for use in the 100‑500 MHz frequency range will be introduced. Electrical characterization of the power divider will be reported. The system has been successfully applied to an extensible, multi-tile plasma source operating from below 100 MHz to over 400 MHz. The plasma is found to light uniformly over the electrode surface for electronegative and electropositive gasses; and a 300mm diameter plasma has been sustained at under 15 Watts.
In multi-tile electrode solutions, the plasma load on the power splitter can result in spatial inhomogeneities in plasma creation; this fault is overcome by careful design of the system. A narrow-gap 300mm by 400 mm plasma is found to light uniformly over the electrode surface for electronegative and electropositive gasses at pressures from 10 mTorr to 3 Torr; plasma has been sustained across the full volume at under 25 Watts.