Paper EW-TuL4
State-of-the-Art Nanostructure Compositional Analysis with Scanning Auger Microscopy

Tuesday, November 10, 2009, 1:00 pm, Room Exhibit Hall 1

Advances in nanotechnology research now require analytical techniques that can image the elemental and chemical compositions of novel three dimensional structures. To meet these needs, a new state-of-the art Scanning Auger Nanoprobe has been developed with high energy resolution chemical state spectroscopy combined with Auger imaging uniquely tailored to nanostructure morphologies. The instrument design will be briefly discussed and highlights from the analysis of several nanostructures structures will be reviewed.