AVS 55th International Symposium & Exhibition
    MEMS and NEMS Tuesday Sessions

Session MN-TuM
Materials Processing and Characterization for MEMS/NEMS

Tuesday, October 21, 2008, 8:00 am, Room 206
Moderator: B.R. Ilic, Cornell University


  Click here to Download program book for this session  
  in Adobe Acrobat format  

Click a paper to see the details. Presenters are shown in bold type.

8:00am MN-TuM1 Invited Paper
Weighing of Biomolecules, Single Cells, and Single Nanoparticles in Fluid
S. Manalis, Massachusetts Institute of Technology
8:40am MN-TuM3
Development of Superhydrophobic Biomimetic Surfaces with Hierarchical Roughness
B. Bhushan, The Ohio State University, K. Koch, Nees Institue for Biodiversity of Plants, Germany, Y.C. Jung, The Ohio State University
9:00am MN-TuM4
Nanomechanical Resonators for Specific Detection of Proteins
C. Guthy, L.M. Fischer, V.A. Wright, A. Singh, J.M. Buriak, S. Evoy, University of Alberta and National Institute for Nanotechnology, Canada
9:20am MN-TuM5
Experimental Determination of the Dynamic Spring Constants of Higher Flexural Modes of Microcantilevers
G. Hähner, G.V. Lubarsky, University of St Andrews, UK
9:40am MN-TuM6
Heterodyne Optical Detection of Mechanical Resonances of Ultra High Frequency Silicon Micro-Resonators
L.J. Klein, T. Barwicz, S. Guha, H.F. Hamann, IBM TJ Watson Research Center
10:40am MN-TuM9
The Effect of Substrate Material and Metallization Layers on the Mechanical Properties of Micromachined Amorphous Silicon Carbide Structures
R.J. Parro, Case Western Reserve University, M.C. Scardelletti, N.C. Varaljay, NASA Glenn Research Center, C.A. Zorman, Case Western Reserve University
11:00am MN-TuM10
Effects of Actuation Voltage and Relative Humidity on Polycrystalline Silicon Corrosion
F. Liu, C.S. Roper, C. Carraro, R. Maboudian, University of California at Berkeley
11:20am MN-TuM11
Gold-Tantalum Nanocomposites as Structural Material for Nanomechanical Sensors
N. Nelson-Fitzpatrick, C. Ophus, E. Luber, University of Alberta, Canada, Z. Lee, V. Radmilovic, Lawrence Berkeley National Laboratory, D. Mitlin, S. Evoy, University of Alberta, Canada
11:40am MN-TuM12
Theoretical and Experimental Investigation of Electrostatically Actuated Bistable Micro and Nano Structures
S. Krylov, Tel Aviv University, Israel, B.R. Ilic, Cornell University, D. Schreiber, Tel Aviv University, Israel, S. Seretensky, Smart Team inc., H.G. Craighead, Cornell University