| AVS 55th International Symposium & Exhibition | |
| Vacuum Technology | Monday Sessions |
| Session VT-MoA |
| Session: | Vacuum Cleanliness, Outgassing, Contamination, and Gas Dynamics |
| Presenter: | F. Sharipov, Universidade Federal do Parana, Brazil |
| Authors: | F. Sharipov, Universidade Federal do Parana, Brazil D. Kozak, Pontificia Universidade Catolica do Parana, Brazil |
| Correspondent: | Click to Email |
The rarefied gas flow through a thin slit represents a great practical and scientific interest. Such kind of flow takes place in many engineering applications, e.g. vacuum equipment, microfluidics, spacecraft design, metrology of gas flow etc. In the present work, such a flow is studied, based on the direct simulation Monte Carlo method. The mass flow rate is calculated with an accuracy of 0.5% over the whole range of the gas rarefaction, from the free molecular regime to viscous one. The flowfield is also provided.