| AVS 55th International Symposium & Exhibition | |
| Thin Film | Monday Sessions |
| Session TF+NC-MoM |
| Session: | ALD of Hybrid Materials and ALD on 3D Nanostructures |
| Presenter: | B. Yoon, University of Colorado at Boulder |
| Authors: | B. Yoon, University of Colorado at Boulder J.L. O'Patchen, University of Colorado at Boulder S.D. Davidson, University of Colorado at Boulder D. Seghete, University of Colorado at Boulder A.S. Cavanagh, University of Colorado at Boulder S.M. George, University of Colorado at Boulder |
| Correspondent: | Click to Email |
Hybrid organic-inorganic polymers can be deposited by molecular layer deposition (MLD) using metal alkyl and diol reactants. Our earlier work studied the deposition of alucone MLD films using trimethyl aluminum (TMA) and ethylene glycol (EG). In this work, we extend the possible metal alkyl reactants to diethyl zinc (DEZ) and the diols to 1,4-butanediol (BD), and 1,4-hydroquinone (HQ). Our studies were performed using in situ Fourier transform infrared (FTIR) spectroscopy to identify the surface species, in situ quartz crystal microbalance (QCM) measurements to quantify the mass gains with each surface reaction, x-ray reflectivity (XRR) studies to measure the film thicknesses and densities and transmission electron microscopy (TEM) to image the MLD films on nanoparticles. The reaction of TMA and EG results in a poly(aluminum ethylene glycol) film that can be described approximately as (Al-O-CH2CH2-O)n. These (Al-O-R-O)n polymer films are known as alucones. The reaction of DEZ with organic diols produces zinc-containing (Zn-O-R-O)n polymer films that can be called "zincones". FTIR spectroscopy studies revealed that the surface chemistry for zincone MLD was similar to alucone MLD. QCM measurements showed linear growth for zincone MLD versus number of reaction cycles. Corresponding XRR and TEM studies revealed zincone MLD growth rates of 2.0 Å per AB reaction cycle. Different organic constituents can be incorporated into alucone MLD films using other organic diols. Alucone MLD was studied using TMA + BD and TMA + HQ. QCM measurements showed linear growth with total mass gains of 30 ng/cm2 for TMA + BD and 89 ng/cm2 Using film densities obtained from XRR studies, these total mass gains represent growth rates of 2.3 Å and 5.4 Å per AB reaction cycle for TMA + BD and TMA + HQ, respectively. The larger growth rates for TMA + HQ may be explained by the greater rigidity of HQ that could prevent "double" reactions from reducing the number of active surface sites and lowering the growth rate per AB reaction cycle.