| AVS 55th International Symposium & Exhibition | |
| Advanced Surface Engineering | Tuesday Sessions |
| Session SE-TuA |
| Session: | Photocatalytic Coatings |
| Presenter: | M.S. Wong, National Dong Hwa University, Taiwan |
| Authors: | P.W. Chou, National Dong Hwa University, Taiwan Y.S. Wang, National Dong Hwa University, Taiwan M.S. Wong, National Dong Hwa University, Taiwan |
| Correspondent: | Click to Email |
Amorphous pure and carbon-doped titania films were prepared by reactive sputtering of titanium metal target and co-sputtering of Ti and carbon targets, respectively, in Ar and oxygen plasma. The as-deposited films were subsequently annealed in vacuum and in air. The influence of annealing atmosphere and temperature on the composition, phase and crystallinity of the films was systematically studied to understand their effects on photocatalytic activity. Both the pure and the carbon-doped films annealed in air transformed into anatase phase at 300℃ and retained pure anatase phase even at 800℃; while those annealed in vacuum transformed into rutile/anatase mixed phase at 300℃ and into pure rutile at 600℃. Carbon incorporation and oxygen deficient environment seem to favor phase transformation of amorphous titania to rutile at low temperatures in post-annealing.