| AVS 55th International Symposium & Exhibition | |
| Advanced Surface Engineering | Thursday Sessions |
| Session SE-ThP |
| Session: | Advanced Surface Engineering Poster Session |
| Presenter: | S.M. Kim, Korea Aerospace University |
| Authors: | S.M. Kim, Korea Aerospace University G.S. Kim, Korea Aerospace University S.Y. Lee, Korea Aerospace University B.Y. Lee, Korea Aerospace University |
| Correspondent: | Click to Email |
In this work, CrN, CrSiN and CrSiN/AlN multilayer coatings were synthesized from Cr, Al and CrSi (Si= 10 at. %) targets using a closed-field unbalanced magnetron sputtering system (CFUBMS). The coatings have been characterized by glow discharge optical emission spectroscopy (GDOES), X-ray diffractometry (XRD), transmission electron microscopy (TEM), X-ray photoelectron spectroscopy (XPS) and nano-indentation. The maximum hardness of CrSiN/AlN multilayer coating with the bilayer period (@lamda@) of 3 nm was approximately 32 GPa, whereas CrN and CrSiN coatings exhibited the maximum hardness of 22 and 27 GPa, respectively. Thermal stability of CrN, CrSiN and CrSiN/AlN multilayer coatings was investigated with annealing treatment for 30 min in air in the temperature range of 600 to 800 °C. The XRD patterns showed that CrN and CrSiN coatings were severely oxidized at 700 °C. However, in the case of CrSiN/AlN multilayer coating, no detectable oxides were observed even at 800 °C. After annealing at 800 °C, the hardness of the CrSiN/AlN multilayer coating exhibited approximately as high as 29 GPa compared to the CrN and CrSiN coatings, which showed only 8 and 18 GPa, respectively. These results revealed that the thermal stability of the CrSiN/AlN multilayer coatings were much superior to that of the CrN and CrSiN coatings at elevated temperatures because the AlN films in the CrSiN/AlN multilayer coatings retard the oxygen diffusion into the coatings. The detailed experimental results will be presented.