AVS 55th International Symposium & Exhibition
    Nanometer-scale Science and Technology Tuesday Sessions
       Session NS+NC-TuM

Invited Paper NS+NC-TuM11
Albert Nerken Award Lecture - Atomic Tool for Nanofabrication Based on Atomic Force Microscopy

Tuesday, October 21, 2008, 11:20 am, Room 311

Session: The Frontiers of Nanoscience
Presenter: S. Morita, Osaka University, Japan
Authors: S. Morita, Osaka University, Japan
Y. Sugimoto, Osaka University, Japan
Ó. Custance, NIMS, Japan
M. Abe, Osaka University, Japan
P. Pou, Universidad Autónoma de Madrid, Spain
P. Jelinek, Academy of Science of the Czech Republic
R. Pérez, Universidad Autónoma de Madrid, Spain
Correspondent: Click to Email

We have been developing a novel bottom-up nanostructuring system at room temperature (RT) based on ultra high vacuum (UHV) atomic force microscopy (AFM). It can image individual atoms, identify chemical species, and then manipulate selected atom species one-by-one to the designed site to assemble complex nanostructures consisted of multi atom species at RT under UHV environment. In this invited talk, we will shortly introduce principles of high-performance and high-resolution UHV-AFM, and then, introduce our recent results related to not only nanocharacterization but also nanofabrication based on UHV-AFM such as (1) site-specific force spectroscopy and force mapping related to chemical identification of individual atoms,1-3 (2) vertical/lateral mechanical atom manipulation.4,5 (3) atom interchange lateral/vertical manipulation and following assembly of embedded atom letters at RT.6

1Y. Sugimoto et al. "Real topography, atomic relaxations, and short-range chemical interactions in atomic force microscopy: The case of the Sn/Si(111)-(r3xr3)R30 surface", Phys. Rev. B 73 (2006) 205329.
2M. Abe et al. "Drift-compensated data acquisition performed at room temperature with frequency modulation atomic force microscopy", Appl. Phys. Lett. 90 (2007) 203103
3Y. Sugimoto et al. "Chemical identification of individual surface atoms by atomic force microscopy", Nature, 446 (2007) pp.64-67.
4N. Oyabu et al. "Mechanical Vertical Manipulation of Selected Single Atoms by Soft Nanoindentation Using Near Contact Atomic Force Microscopy", Phys. Rev. Lett. 90 (2003) 176102.
5Y. Sugimoto et al. "Mechanism for room-temperature single atom lateral manipulations on semiconductors using dynamic force microscopy", Phys. Rev. Lett. 98 (2007) 106104.
6Y. Sugimoto et al. "Atom inlays performed at room temperature using atomic force microscopy", Nature Materials, 4 (2005) pp.156-159.