| AVS 55th International Symposium & Exhibition | |
| Nanomanufacturing Focus Topic | Thursday Sessions |
| Session NM-ThP |
| Session: | Nanomanufacturing Poster Session |
| Presenter: | M. Okada, University of Hyogo, Japan |
| Authors: | M. Okada, University of Hyogo, Japan M. Iwasa, SII Nanotechnology Inc. K. Nakamatsu, University of Hyogo, Japan K. Kanda, University of Hyogo, Japan Y. Haruyama, University of Hyogo, Japan S. Matsui, University of Hyogo, Japan |
| Correspondent: | Click to Email |
Nanoimprint lithography (NIL) has a capability to fabricate nanostructure devices with a high-throughput and a low cost. Nanoimprint lithography molds are coated with an antisticking layer so that they do not come in contact with the adhesion of replication materials. Friction and adsorption occurs between the nanostructure mold and nanoimprint resin during demolding. Measuring the nanoscale frictional force and adsorptivity between the antisticking layer and resin is therefore important. In this paper, we measured the nanoscale frictional force and adsorptivity between a cantilever and nanoimprint resin by scanning probe microscopy (SPM) using Si cantilevers with and without antisticking layer. We used a self-assembled monolayer (SAM) consisting of a silane-coupling agent with fluoropolymer (OPTOOL DSX: Daikin industries) as an antisticking layer. The thermoplastic resin (PMMA; OEBR 1000: TOKYO OHKA KOGYO Co.) and the photosensitive resin (PAK-01: Toyo Gosei Co.) were also used. In the SPM measurement using Si cantilever, results were obtained between the Si and NIL resin. On the other hand, the measurement results between the antisticking layer and resin were obtained by SPM using the cantilever with an antisticking layer. The frictional force of PMMA and PAK-01 measured using the cantilever with an antisticking layer are respectively 0.7 and 0.6 times lower than those using the cantilever without the antisticking layer. The adsorptivity of PMMA and PAK-01 measured by SPM using the cantilever with an antisticking layer are 0.4 and 0.6 times lower than those using the cantilever without the antisticking layer. These results show that SPM measurement using the cantilever with and without antisticking layers can be applied to evaluate the nanoscale release effect between an antisticking layer and nanoimprint resins.