AVS 55th International Symposium & Exhibition
    Graphene Topical Conference Monday Sessions
       Session GR+TF+NC-MoM

Paper GR+TF+NC-MoM11
Growth and Structures of Carbon Nanowalls during Plasma-Enhanced Chemical Vapor Deposition

Monday, October 20, 2008, 11:40 am, Room 306

Session: Graphene and 2-D Carbon Nanostructures
Presenter: H. Yoshimura, Yokohama City University, Japan
Authors: H. Yoshimura, Yokohama City University, Japan
N. Kitada, Yokohama City University, Japan
K. Kojima, Yokohama City University, Japan
M. Tachibana, Yokohama City University, Japan
Correspondent: Click to Email

Recently two-dimensional carbon nanostructures called carbon nanowalls (CNWs) have been fabricated by plasma-enhanced chemical vapor deposition.1 The CNWs are vertically grown on the substrate. According to our previous studies of Raman spectroscopy2 and transmission electric microscopy (TEM),3 and Ultraviolet photoelectron spectroscopy,4 CNWs are composed of small crystallites with a high degree of graphitization. And these small crystallites so-called “nano-graphite domains” were slightly rotated each other. Such shapes and structures of CNWs may provide us with various applications, such as gas storage, membranes for electrochemical energy storage, and field emitters. The understanding of growth process and structures in CNWs is required for the practical applications. In this paper, we report the detail of growth process and structures of CNWs. CNWs were grown by using a dc plasma-enhanced chemical vapor deposition method with a gas mixture of CH4, H2, Ar. Typical flow rate of CH4, H2 and Ar were 10, 10, and 80 sccm (standard cubic centimeters per minutes at standard temperature and pressure). To investigate the growth process, specimens were prepared for plasma reaction times of 1, 2, 3, 4, 5, 7 and 15 minutes. The shapes and structures of the specimens were investigated by means of atomic force microscopy (AFM), grazing incidence X-ray diffraction (GIXD), and Raman spectroscopy. In addition, the change in the size and quality of crystallites was observed. As reported previously,5 it was observed that CNWs changes from parallel to perpendicular to the substrate with deposition time. In addition, the transition structure from parallel to perpendicular was clearly observed. From these results, the growth process of CNWs will be discussed.

1Y. Wu, et al., Adv. Matter. 14, 64 (2002)
2S. Kurita, et al., J. Appl. Phys. 97, 104320 (2005)
3K. Kobayashi, et al., J. Appl. Phys. 101, 094306 (2007)
4I. Kinoshita, et al., Chem. Phys. Lett. 450, 360 (2007)
5B. L. French, et al., Thin Solid. Film, 494, 105, (2006).