Paper EW-WeM1
New Premium Line of Turbomolecular Pumps by Oerlikon Leybold Vacuum, TURBOVAC SL 80 - 300 – 700

Wednesday, October 22, 2008, 10:00 am, Room Exhibit Hall

Oerlikon Leybold Vacuum as a leading supplier of vacuum technology with the largest product offering has recently introduced the new premium line of turbomolecular pumps, the TURBOVAC SL line. This family has been developed to generate high vacuum in the most economic way for most simple operation. The pumps are available in models with pumping speeds of 70 to 700 l/s generated by computer designed rotor devices. The high precision mechanical ball bearing systems are made out of industrial proven material, a combination of ceramics and stainless steel. They are lubricated by high efficiency grease for optimum lifetime. The pumps are manufactured with the latest technology of CNC machines to provide the high level quality standard which the high tech users expect. The quality of each pump is controlled automatically by frequency analysis before leaving the factory. For minimum footprint the TURBOVAC SL pumps can be equipped with the box controller mounted on the pump body at multiple sites as well as separated from the pump. This allows the user to optimize the available space in the vacuum system. The new "anybus" interface concept offers the choice between RS232, 485, Ethernet, profibus or 24V type. The new family of TURBOVAC SL turbomolecular pumps has been designed to provide proven quality in combination with highest flexibility in installation and communication. This makes the pump family the best solution for the use in analytical instruments, research labs in universities and industry and industrial production, i.e. thin film coating application.