|AVS 55th International Symposium & Exhibition|
|Exhibitor Workshops||Tuesday Sessions|
|Presenter:||C. Malocsay, Semicore Equipment Inc.|
|Correspondent:||Click to Email|
A full featured vacuum sequencer for pump, vent & vacuum interlocking for semi-automated process control. The RFG is a PC based graphical user interface (GUI) with VGA touch screen. Vacuum sequencing and input / output controls are provided by an embedded PLC. The RFG integrates easily with a host of industry proven power supplies, vacuum gauges and deposition instruments.