| AVS 55th International Symposium & Exhibition | |
| Exhibitor Workshops | Tuesday Sessions |
| Session EW-TuM |
| Session: | Exhibitor Workshops |
| Presenter: | C. Malocsay, Semicore Equipment Inc. |
| Correspondent: | Click to Email |
A full featured vacuum sequencer for pump, vent & vacuum interlocking for semi-automated process control. The RFG is a PC based graphical user interface (GUI) with VGA touch screen. Vacuum sequencing and input / output controls are provided by an embedded PLC. The RFG integrates easily with a host of industry proven power supplies, vacuum gauges and deposition instruments.