AVS 55th International Symposium & Exhibition
    Biomaterial Interfaces Tuesday Sessions
       Session BI-TuP

Paper BI-TuP11
Quantitative Analysis of Angular Resolved XPS-Measurements: Influence of Inaccuracies in Take-Off and Acceptance Angle

Tuesday, October 21, 2008, 6:30 pm, Room Hall D

Session: Biomaterials Interfaces Poster Session with Focus on Cells and Proteins at Interfaces
Presenter: C. Van der Marel, Philips Research - MiPlaza, The Netherlands
Authors: C. Van der Marel, Philips Research - MiPlaza, The Netherlands
J.H.M. Snijders, Philips Research - MiPlaza, The Netherlands
D.D.C.A. Van Oers, Philips Research - MiPlaza, The Netherlands
E.P. Naburgh, Philips Research - MiPlaza, The Netherlands
Correspondent: Click to Email

For quantitative analysis of Angular Resolved XPS-measurements the take-off angle of the detected electrons is an important input parameter. A device has been developed that allows measurement of the real take-off angle as a function of the tilt angle of the sample. The acceptance angle of the detector is also determined using this device. The device has been tested extensively in two commercial XPS-instruments (Quantera from ULVAC – PHI); small but significant deviations have been found between real and set values of the take-off angles. To investigate the influence of the acceptance angle and of inaccuracies in the take-off angles several series of samples were analyzed. The samples consisted of a homogeneous substrate coated with a thin organic layer (e.g. phosphonic SAM-layers on Al2O3, alkyl-thiols on copper). Quantitative analysis of the XPS-results provided values for the layer thickness of the organic layer, for the coverage and for the “real” atomic concentrations in substrate and in the organic layer. In the lecture it will be shown that the use of accurate values of the acceptance and the take-off angles is a prerequisite to obtain consistent results.