| AVS 54th International Symposium | |
| Vacuum Technology | Thursday Sessions |
| Session VT-ThM |
| Session: | Pumping, Pressure Measurement and Calibration |
| Presenter: | A.D. Chew, BOC Edwards, UK |
| Authors: | A.D. Chew, BOC Edwards, UK C. Shaw, BOC Edwards, UK |
| Correspondent: | Click to Email |
A single dry pump mechanism capable of reaching high vacuum and itself exhausting to atmospheric pressure has been a "vacuum-technology panacea". The development and deployment of a single-shaft, high-speed EPX pump isince has gone some considerable way to achieving this goal. This paper will describe the stages in the development history and expanding applications the pumps has been applied to. This will be further illustrated by specific applications examples, reliability and economic experiences.