|AVS 54th International Symposium|
|Session:||Biolubrication, Sensing and Adhesion|
|Presenter:||B.P. Miller, North Carolina State University|
|Authors:||B.P. Miller, North Carolina State University
M. Brukman, North Carolina State University
C.C. Baker, Naval Research Laboratory
R.J. Nemanich, North Carolina State University
K.J. Wahl, Naval Research Laboratory
J. Krim, North Carolina State University
|Correspondent:||Click to Email|
One possible solution to the in-use stiction problem in Micro-Electro-Mechanical systems (MEMS) is the introduction of a bound plus mobile lubricant combination.1 For this system, one monolayer of the bound lubricant (perfluorodecyltrichlorosilane, PFTS) bonds to the surface of the device. The mobile lubricant (tricresyl phosphate, TCP) can replenish the layer after rubbing contacts wear it away, thus keeping the device free of contamination. Friction behavior of this lubricant combination was examined over three different regimes using a macroscopic tribometer, an AFM, and a quartz crystal microbalance (QCM). A comparative study of bound only versus bound plus mobile lubricants showed a decrease of the coefficient of friction with the addition of the mobile lubricant to the bound layer. Dynamic properties of the mobile film were characterized with the QCM. This work is funded by AFOSR Extreme Friction MURI Grant #FA9550-04-1-0381.
1W. Neeyakorn, M. Varma, C. Jaye, J. E. Burnette, S.M. Lee, R. J. Nemanich, C. Grant, J. Krim, Dynamics of Vapor-Phase Organophosphates on Silicon and OTS, Tribology Letters, in press.