| AVS 54th International Symposium | |
| Tribology | Wednesday Sessions |
| Session TR1+MN-WeA |
| Session: | Surfaces and Interfaces in MEMS |
| Presenter: | R. Maboudian, University of California at Berkeley |
| Authors: | R. Maboudian, University of California at Berkeley C. Carraro, University of California at Berkeley |
| Correspondent: | Click to Email |
Many applications require sensors and actuators that can survive harsh environments, including high temperature and high relative humidity. This presentation will examine the behavior of polycrystalline silicon based micro-electromechanical systems in a variety of harsh environments. Then, the effectiveness of self-assembled monolayers and silicon carbide for enhanced MEMS reliability under these conditions will be discussed.