| AVS 54th International Symposium | |
| Tribology | Wednesday Sessions |
| Session TR1+MN-WeA |
| Session: | Surfaces and Interfaces in MEMS |
| Presenter: | S.H. Kim, Pennsylvania State University |
| Authors: | D.B. Asay, Pennsylvania State University M.T. Dugger, Sandia National Laboratories S.H. Kim, Pennsylvania State University |
| Correspondent: | Click to Email |
Friction, adhesion, and wear are dramatically affected by the environment in which surfaces come into contact. In the case of an alcohol vapor environment, the silicon surface reacts to form an alkoxide. Shearing these surfaces also produces higher weight oligomers. These molecules are continuously replenished in the contact region, drastically reducing wear and friction provided that the alcohol vapor pressure is near or above the vapor pressure required for monolayer coverage. At these conditions, the lubricating layer protects the silicon surfaces with little to no wear observed. Tribological properties are reported at the nanoscopic (AFM), mesoscopic (MEMS), and macroscopic (tribometer). In all cases, the vapor successfully lubricates and minimizes wear. In the case of MEMS sidewall friction, the lifetime of the device is radically increased.