| AVS 54th International Symposium | |
| Thin Film | Tuesday Sessions |
| Session TF-TuP |
| Session: | Aspects of Thin Films Poster Session |
| Presenter: | K. Harada, Kogakuin University, Japan |
| Authors: | K. Harada, Kogakuin University, Japan I. Takano, Kogakuin University, Japan |
| Correspondent: | Click to Email |
DLC (Diamond Like Carbon) constituting a class of new materials is an amorphous carbon including hydrogen and has similar properties of matter with a diamond. DLC film was formed by the ion beam evaporation method in the early 1970's,1 and after that has been manufactured by various methods such as CVD (Chemical Vapor Deposition) or PVD (Physical Vapor Deposition). Because representative mechanical properties of DLC is to show the high hardness and low friction coefficient, DLC is applied in various filed such as motor parts or tools. Also the electric properties of DLC are anticipated as field emission source. In this study, mechanical properties were investigated about the DLC films prepared by the ion beam assist method. The ion beam assist method of present study was applied for formation of nitrogen-doped DLC films using irradiation of nitrogen ion in a C7H8 gas atmosphere. Composition and microstructure of these films were investigated by X-ray photoelectron spectroscopy and Raman spectroscopy. The mechanical properties were evaluated by the hardness and a friction coefficient. The hardness was measured from size of an indentation with a Knoop indenter. The friction coefficient was measured for a SUJ2 ball with a constant load 0.98N until the sliding distance reaches a length of 10m. On mechanical properties, the film prepared at an acceleration voltage of 12 kV obtained the highest hardness in spite of very thin carbon layer, while the friction coefficient of this film showed the high value close to that of stainless steel. Conversely, the hardness of the film prepared at a voltage of 1 kV showed the low value, while the friction coefficient of this film obtained the lowest value. The ware track of the film prepared at a voltage of 1 kV had a small thrust in a depth as the film showed the low friction coefficient compared with the film of 12 kV. The concentration of nitrogen was around 7% at an acceleration voltage of 1 kV and was not an enough value for leading the drastic change of physical matters.
1S. Aisenberg , R. Chabot : J. Appl. Phys., 42, 2953 (1971).