| AVS 54th International Symposium | |
| Thin Film | Tuesday Sessions |
| Session TF-TuP |
| Session: | Aspects of Thin Films Poster Session |
| Presenter: | P.-J. Ko, Chosun University, Korea |
| Authors: | P.-J. Ko, Chosun University, Korea P.-G. Jung, Chosun University, Korea Y.-K. Jun, Chosun University, Korea N.-H. Kim, Sungkyunkwan University, Korea W.-S. Lee, Chosun University, Korea |
| Correspondent: | Click to Email |
Piezoelectric actuators and sensors are main applications of micro-electro-mechanical system (MEMS). The perovskite lead zirconate titanate (PZT) piezoelectric ceramic is one of the most commonly used piezoelectric materials due to its high dielectric constant and piezoelectric coupling coefficient. The piezoelectric PZT films have been successfully fabricated and processed by using various semiconductor technologies in manufacture of MEMS applications. Some investigations on PZT-chemical mechanical polishing (CMP) process were also carried out for the patterning and the improvement of surface morphology. In this study, dielectric and piezoelectric properties of the polished PZT films were investigated for the application of CMP process to the piezoelectric MEMS applications. The crystal structure and the microstructure of PZT films were investigated by X-ray diffraction (XRD) and scanning electron microscopy (SEM), respectively before and after CMP process. The P-E hysteresis loops of the polished PZT films were analyzed and compared to the as-deposited samples. Consequently, the CMP process parameters were optimized for the sufficient piezoelectric coefficient of PZT films. Acknowledgement: This work was supported by Korea Research Foundation Grant (KRF-2006-005-J00902).