| AVS 54th International Symposium | |
| Advanced Surface Engineering | Tuesday Sessions |
| Session SE-TuM |
| Session: | Glancing Angle Deposition |
| Presenter: | M. Foss, University of Aarhus, Denmark |
| Authors: | A. Dolatshahi-Pirouz, University of Aarhus, Denmark M.B. Hovgaard, University of Aarhus, Denmark K. Rechendorff, Ecole Polytechnique Federale de Lausanne, Switzerland M. Foss, University of Aarhus, Denmark F. Besenbacher, University of Aarhus, Denmark |
| Correspondent: | Click to Email |
Recently there has been an increasing focus on the growth of thin films and nanostructures with rough surface morphologies on the nanometer length scale for applications in biotechnology, cell/tissue engineering, and catalysis, since the surface morphologies and the absolute value of the surface roughness on the nanometer scale may influence the performance in these areas. In this work, thin platinum films were grown by e-gun evaporation with oblique angle of incidence between the deposition flux and the substrate in order to generate surfaces with well controlled rough morphologies. Atomic force microscopy (AFM) was used to determine the root-mean square (rms) value, w, of the surface roughness. From the scaling behavior of w for the thin platinum films, we observe that while the roughness exponent α remains unchanged, the growth exponent β changes from 0.49 ± 0.04 to 0.26 ± 0.01 as the deposition angle approaches grazing incidence. The change in the growth exponent β indicates that the kinetics of the film growth is influenced by both surface diffusion and shadowing effects under oblique incidence deposition.