| AVS 54th International Symposium | |
| Advanced Surface Engineering | Tuesday Sessions |
| Session SE-TuA |
| Session: | Naturally and Artificially Nanolaminated Coatings |
| Presenter: | J. Li, University of Nebraska-Lincoln |
| Authors: | J. Li, University of Nebraska-Lincoln S.R. Kirkpatrick, University of Nebraska-Lincoln S.L. Rohde, University of Nebraska-Lincoln |
| Correspondent: | Click to Email |
ZnO/Ag/ZnO multilayer films can be used in Low-E glass, solar cells and flat panel displays. Thin silver layers sandwiched between layers ZnO have been deposited by High Power Pulsed Magnetron Sputtering (HPPMS). By varying the deposition conditions during HPPMS, a thin, dense and uniform silver layer with low resistivity, high transmittance in visible light range have been obtained. The optical properties of ZnO/Ag/ZnO multilayer films with silver layer deposited by HPPMS have been studied using spectroscopic ellipsometry and infrared spectroscopic ellipsometry. The results have also been compared with multilayer films with silver layers deposited by conventional DC magnetron sputtering. For ZnO/Ag/ZnO multilayer films, the Ag-HPPMS multilayer films showed lower resistivity, lower IR transmittance than DC magnetron sputtered films. The optical properties of ZnO/Ag/ZnO multilayer films with different silver layer thickness deposited by HPPMS have also been investigated, with respect to their potential in an array of optical applications.