| AVS 54th International Symposium | |
| Exhibitor Workshops | Wednesday Sessions |
| Session EW-WeA |
| Session: | Exhibitor Workshops |
| Presenter: | K. Caldwell, Varian, Inc. |
| Authors: | S. Palmer, Varian, Inc. K. Caldwell, Varian, Inc. |
| Correspondent: | Click to Email |
The IDP-3 is a compact, high performance dry pump that provides affordable oil-free vacuum and easy system integration, and is suitable for a wide variety of applications. The IDP-3 employs an innovative hermetic design in which the motor and bearings are outside the vacuum space, allowing full isolation of all pumped gases. Delivering a robust pumping speed of 60 l/m and a very low base pressure of less than 250 milliTorr, the IDP-3 provides all the advantages of Varian’s patented scroll pump technology in a compact, lightweight, cost-effective package.