AVS 54th International Symposium
    Electronic Materials and Processing Monday Sessions
       Session EM+NS-MoA

Paper EM+NS-MoA4
Characterization of Ion Beam Deposited Quantum Dots Thin Films from Colloidal Solution

Monday, October 15, 2007, 3:00 pm, Room 612

Session: Semiconductor Nanostructures for Electronics and Optoelectronics I
Presenter: Y. Tani, HOYA Corporation, Japan
Authors: Y. Tani, HOYA Corporation, Japan
S. Kobayashi, HOYA Corporation, Japan
H. Kawazoe, HOYA Corporation, Japan
Correspondent: Click to Email

Distinctly monodispersed core/shell structured semiconductor nanocrystals (NCs) quantum-dots (QDs) prepared by chemical synthetic methods in liquid solutions are fascinating fluorescent materials because of efficient saturated chromatic luminescence. In the consideration of applications to light emitting flat panel displays, ready-synthesized NCs can be expected to be pieces of a light emitting component being deposited on a heterologous large areal polycrystalline or amorphous substrates, in contrast with a restrictive conditioned Stranski-Krastanov mode QDs. However, it has been a daunting challenge to form an organic-free luminescent QD structured film from the wet QDs, which are stably dispersed in an organic solvent or water with hundreds of ligand molecules on their surface. We developed a very low energy NC ion beam deposition technique,1 which is capable of forming QD ion beam from the colloidal solution to deposit fluorescent thin films without significant organic contamination. In present study fabrications of high efficient luminescent QD structured thin films from CdSe/ZnS colloidal NC source are demonstrated. Semiconductor device requires a compatible technology with the colloidal source and a high-vacuum deposition process for simultaneous pursuit of a preservation of NC configuration and an exclusion of the organics derived from the ligand and solvent. An electrospray technique was employed for a soft ionization process to obtain nanocrystalline ions. From the requirement of a transportation of the ultraheavy ions and a nonequilibrium deposition, a supersonic flow with a speed of 1.1×103 m/s was formed with a free jet nozzle arrangement attaching a differential pumping system, which also works as a neutral molecular evacuator. Furthermore, for preventing the depositing films from an exposure with lighter ions such as the ones originated from the organic solvent and surfactant, ion optics including an energy analyzer are applied. Microstructural observations and chemical composition analysis evidenced that the deposited film has a closely packed polycrystalline structure with less organic contamination. Its photoluminescence spectrum reproduces the original distinct single peak spectrum from the colloidally dispersed NCs. The NC ion with kinetic energy of 0.1-0.4 eV/atom provides appropriate energy dissipation for a deposition of NCs.

1S. Kobayashi et al Jpn. J. Appl. Phys. 46 (2007) L392.