| AVS 51st International Symposium | |
| Vacuum Technology | Tuesday Sessions |
| Session VT-TuP |
| Session: | Poster Session |
| Presenter: | A. Kasahara, National Institute for Materials Science, Japan |
| Authors: | A. Kasahara, National Institute for Materials Science, Japan M. Goto, National Institute for Materials Science, Japan Y. Pihosh, National Institute for Materials Science, Japan M. Tosa, National Institute for Materials Science, Japan |
| Correspondent: | Click to Email |