AVS 51st International Symposium
    Vacuum Technology Tuesday Sessions
       Session VT-TuP

Paper VT-TuP11
Novel Modular Controller for Quadrupole Mass Spectrometers

Tuesday, November 16, 2004, 4:00 pm, Room Exhibit Hall B

Session: Poster Session
Presenter: N. Mueller, Pfeiffer Vacuum
Authors: N. Mueller, Pfeiffer Vacuum
S. Foster, Pfeiffer Vacuum
G. Peter, Pfeiffer Vacuum
Correspondent: Click to Email
High performance single quadrupole mass spectrometers nowadays are used in a very wide range of applications. Some examples are accurate residual gas analysis down to the XHV range, vapor beam analysis and control in UHV-MBE tools, isotope ratio measurements, quantitative gas analysis in e.g. catalytic research, and process control in the chemical, pharmaceutical, and metallurgical industry. The very different demands of these applications can be fulfilled by very flexible and modular mass spectrometer controllers only. A novel system contained in a only 3u high 19 inch rack system has been developed that shows the following key features: Intel X-scale processor based controller with Windows CE.net operation system; high speed digital signal processor for mass spectrometer control and data acquisition to allow for scan rates down to 125 microsec / amu; communication to host computer via USB or Ethernet for network operation using OPC standards; fieldbus module to communicate with standardized industrial input / output modules; webserver for control of the system without the need for specific software; modular ion source supply with digital emission current controller for easy adaptation to different filament types, and individually exchangeable voltage supplies for ion lenses; voltages can be biased up to +/-1000V and polarity can be changed to detect positive as well as negative ions; ion counter for count rates up to 130MHz; high voltage supplies for operation various SEMs; autorange control for electrometer amplifiers; analog and digital input / output module for easy connection to external measurement and control devices. In combination with a wide selection of quadrupole rod systems, RF stages, ion sources and ion optics, this system allows for numerous applications from basic research to industry. Detailed functional description as well as data from selected applications will be presented.