AVS 51st International Symposium
    Thin Films Monday Sessions
       Session TF-MoP

Paper TF-MoP26
Monolayer Template Patterning of Ceramic Film on Flexible Plastic Substrate

Monday, November 15, 2004, 5:00 pm, Room Exhibit Hall B

Session: Poster Session
Presenter: N. Shirahata, National Institute of Materials Science, Japan
Authors: N. Shirahata, National Institute of Materials Science, Japan
Y. Sakka, National Institute of Materials Science, Japan
A. Hozumi, National Institute of Advanced Industrial Science and Technology, Japan
Correspondent: Click to Email
Microfabrication technique for metal oxide film on polymeric sheet has been demonstrated to develop flexible device technology. A polyimide (PI) sheet was employed as a polymeric substrate. Oxide nanoskin (ONS) interlayer (~ 2.1 nm) was formed onto the photooxidized PI (PIox) substrate by photochemical modification of the triethoxysilane layer, which was previously covered over the substrate through chemical vapor deposition process. 1H,1H,2H,2H-perfluorodecyltrimethoxysilane (FAS) molecule was used to prepare a microstructured chemical template for area-selective deposition of metal oxide films onto the predefined sites of the PIox surface. The film deposition was performed in aqueous solution of tin chloride based on under ambient air an environmental-friendly system. The ONS interlayer has played a key role through the microfabrication process. First, the ONS was indispensable to prepare a superior hydrophobic PI surface where highly ordered FAS molecules were densely formed. Second, the ONS enabled us to prepare an ideal FAS chemical template for the area-selective deposition of metal oxide film. Without the ONS interlayer, the reproducible results could not be obtained for the microfabrication. Additionally, on the ideal chemical template, thickness of the microfabricated films was well controllable in the ranging from nanoscale to microscale with keeping a perfect area-selectively. In this paper, the essential roles of ONS interlayer on both the preparation of high-quality chemical template and the reproducible microfabrication of metal oxide film, i.e., SnOx film, have been discussed in details.