AVS 51st International Symposium
    Thin Films Monday Sessions
       Session TF-MoP

Paper TF-MoP10
TCO Thin Film Characteristics with Respect to Multi Layer Coatings between Plastic Substrate and ITO Layer

Monday, November 15, 2004, 5:00 pm, Room Exhibit Hall B

Session: Poster Session
Presenter: M.G. Kim, ITM Inc., Korea
Authors: M.G. Kim, ITM Inc., Korea
H.S. Jeong, ITM Inc., Korea
Y.W. Seo, ITM Inc., Korea
S.J. Kwon, Kyungwon Univ., Korea
Correspondent: Click to Email
Recently organic electro luminescence displays(OELD) using a plastic substrate such as PET and PES are emerging as a strong new candidate for flat panel displays. In this study we made the buffer layer which is multi-layer coatings such as (DLC/SiO@sub 2@)@sub n@ between plastic substrate and transparent conducting oxide(TCO). To minimize the oxygen transmission and the water vapor transmission of the TCO coated substrate, we also designed the thicknesses of multi-layer for high visible transmittance using optical thin film software. The DLC is characterized by strong hardness, flatness and low gas permeability to moisture and oxygen. The unipolar pulse mode of the power supply(IBP1030, ITM, Inc.) was used on a graphite target, and the mixed gas were argon and methane. ITO was deposited on the buffer layer of the plastic substrate in a horizontal single ended in-line sputter system equipped with a pulsed dual magnetron sputter. To understand the properties of the ITO films deposited on the multi-layered buffer layer, we investigated the electrical resistivity, film structure, optical transmission, surface roughness, and gas permeability.