AVS 51st International Symposium
    Surface Science Monday Sessions
       Session SS2-MoA

Paper SS2-MoA2
The First Demonstration of the Gas Phase Modification of Scribed Silicon

Monday, November 15, 2004, 2:20 pm, Room 210C

Session: Assembled Monolayers
Presenter: M.V. Lee, Brigham Young University
Authors: M.V. Lee, Brigham Young University
S.M. Casey, University of Nevada, Reno
M.R. Linford, Brigham Young University
Correspondent: Click to Email
Chemomechanical Surface Functionalization (CMSF) is a simple and versatile method for patterning and functionalizing silicon surfaces. Using this method very small (ca. 30 nm) features have been scribed on silicon using an AFM, as well as much larger features (many microns) using a diamond tip. To date, CMSF has been demonstrated with a variety of neat liquids, including different alkenes, alkynes, alkyl halides, alcohols, aldehydes, and epoxides. However, in spite of the power of this approach for the direct modification of silicon at any desired point on its surface, a drawback of this method is that the unreacted liquid must be removed from the surface by washing following CMSF. Washing creates an opportunity for unwanted surface reactions and/or surface contamination. A CMSF method that would eliminate the surface cleaning step would be an important advance for this technique. Here we show that that two gas phase reagents (ethylene and acetylene) react with scribed silicon. It is noteworthy that this process takes place in an open laboratory using a simple laboratory apparatus that directs a jet of these reactive gases onto the silicon surface during scribing. The resulting surfaces were characterized by X-ray photoelectron spectroscopy, wetting, time-of-flight secondary ion mass spectrometry, Auger electron spectroscopy, and temperature programmed desorption. @FootnoteText@ Niederhauser, T.L.; Lua, Y.-Y.; Jiang, G.; Davis, S.D.; Matheson, R.; Hess, D.A.; Mowat, I.A.; Linford, M.R. Arrays of Chemomechanically Patterned Patches of Homogeneous and Mixed Monolayers of 1-Alkenes and Alcohols on Single Silicon Surfaces. Angew. Chem. Int. Ed. 2002, 41(13), 2353-2356.