AVS 51st International Symposium
    Surface Science Tuesday Sessions
       Session SS-TuP

Paper SS-TuP1
HREELS and TPD Investigation of Electron Irradiation Effects on Diethylsilane-Covered Si(100) Surfaces at 100K

Tuesday, November 16, 2004, 4:00 pm, Room Exhibit Hall B

Session: Poster Session
Presenter: J. Lozano, Bradley University
Authors: J. Lozano, Bradley University
D. Early, Bradley University
J.H. Craig, Jr., Bradley University
P. Wang, Bradley University
K.R. Kimberlin, Bradley University
Correspondent: Click to Email
The effects of 600-eV electron irradiation of diethylsilane (DES) adsorbed on Si(100) was studied using high-resolution electron energy loss spectroscopy (HREELS) and temperature programmed desorption. The effects of electron irradiation at submonolayer and multilayer DES coverages will be discussed. Previous electron stimulated desorption and TPD studies suggested an electron-induced beta hydride elimination process as a pathway for ethyl group desorption at 100K. The results of HREELS experiments performed to probe such processes will be discussed.