AVS 51st International Symposium
    Advanced Surface Engineering Tuesday Sessions
       Session SE-TuM

Paper SE-TuM9
Development of Hybrid Deposition Techniques for Nanocomposite Coating Growth

Tuesday, November 16, 2004, 11:00 am, Room 303D

Session: Hard and Low Friction Coatings with Advanced Designs
Presenter: A.A. Voevodin, Air Force Research Laboratory
Authors: A.A. Voevodin, Air Force Research Laboratory
J.G. Jones, Air Force Research Laboratory
J.S. Zabinski, Air Force Research Laboratory
Correspondent: Click to Email
Development of hybrid processes, combining filtered vacuum arc deposition, magnetron, sputtering, and laser ablation for synthesis of functionally gradient and nanocomposite materials are discussed. Hybrid techniques facilitate a high degree of structural control and allow growth of nanostructured materials at low temperature by mixing plasma streams from various sources. Special attention was given to process instrumentation for plasma chemistry and energy control. Spectroscopic, imaging and time of flight analysis techniques are discussed. Interesting plasma interactions were found in a hybrid of laser ablation and ion beam deposition, where short-lived interactions between two plasma sources were explored to produce alumina oxinitride films. In addition, studies of a combination of laser ablation with magnetron sputtering (MSPLD) are presented. In this hybrid process, highly energetic plasma plumes from laser ablation were intersected with a magnetron-generated plasma containing sputtered metal atoms. Another hybrid process combined filtered vacuum arc and magnetron sputtering. All processes were tuned to produce advanced tribological coatings for wear protection of engineering components, combining metals, oxides, carbides, and dichalcogenides into various nanocomposite coating designs.