AVS 51st International Symposium
    Semiconductors Tuesday Sessions
       Session SC-TuP

Paper SC-TuP7
Transparent Conducting Oxides Based on ZnO by Reactive Sputtering

Tuesday, November 16, 2004, 4:00 pm, Room Exhibit Hall B

Session: Poster Session
Presenter: M.A. Santana-Aranda, Instituto Mexicano del Petroleo, México
Authors: M.A. Santana-Aranda, Instituto Mexicano del Petroleo, México
M. Meléndez-Lira, Centro de Investigación y Estudios Avanzados, México
M. Becerril-Silva, Centro de Investigación y Estudios Avanzados, México
S.J. Jiménez-Sandoval, Centro de Investigación y Estudios Avanzados, México
Correspondent: Click to Email
Transparent conducting oxides have a broad variety of applications in the electric and optoelectronic industries. Applications like conducting window material for solar cells as well as active layers of LEDs and laser diodes emitting in the UV. We have employed reactive sputtering to deposit ZnO and Al:ZnO thin films on glass substrates. The target was formed with zinc and aluminum circular plates; we controlled the aluminum content changing the ratio of Al/Zn areas. Surface morphology and aluminum content were monitored with a scanning electron microscope. X ray diffraction and Raman spectroscopy measurements were performed to monitor the crystalline structure of the films. The energy of the absorption edge was monitored by optical transmission measurements. The changes observed in the absorption edge are related with the changes in the aluminum content of the films. Resistivity of the films was determined by electrical measurements, these results are also well correlated with the aluminum content.