AVS 51st International Symposium
    Plasma Science and Technology Wednesday Sessions
       Session PS-WeA

Paper PS-WeA7
Radiofrequency Discharge and Sheath Structure Around Dissimilar Surfaces

Wednesday, November 17, 2004, 4:00 pm, Room 213A

Session: Plasma Diagnostics
Presenter: E.V. Barnat, Sandia National Laboratories
Authors: E.V. Barnat, Sandia National Laboratories
G.A. Hebner, Sandia National Laboratories
Correspondent: Click to Email
Discontinuities present on a surface introduce perturbations to both the field and excitation around the discontinuity. Spatially resolved electric fields in an argon sheath near the discontinuous surfaces were measured using laser-induced fluorescence-dip spectroscopy (LIF-dip) while excitation is measured by LIF, optical emission and a Langmuir probe. Spatial maps of the electric field and excitation were obtained in the regions near these discontinuities as functions of power and pressure of the discharge. These measurements demonstrate the degree and extent of perturbation introduced into the plasma. Surface discontinuities investigated included metal-dielectric, metal-metal and metal-step junctions. This work was supported by the Division of Material Sciences, BES, Office of Science, U. S. Department of Energy and Sandia National Laboratories, a multiprogram laboratory operated by Sandia Corporation, a Lockheed Martin Company for the United States Department of Energyâ?Ts National Nuclear Security Administration under contract DE-AC04-94AL85000.