AVS 51st International Symposium
    Plasma Science and Technology Monday Sessions
       Session PS-MoP

Paper PS-MoP8
In-Situ FTIR Characterization of Gas Phase Chemistry in Continuous and Pulsed Inductively Coupled 1,3-Butadiene Discharges in a Gec Cell, Cross-Correlated Against Ex-Situ ATR Surface Analysis

Monday, November 15, 2004, 5:00 pm, Room Exhibit Hall B

Session: Poster Session
Presenter: A.K. Jindal, The University of Texas at Dallas
Authors: A.K. Jindal, The University of Texas at Dallas
A.J. Prengler, NEC
J.R. Frautschi, Western Life Sciences
L.J. Overzet, The University of Texas at Dallas
M.J. Goeckner, The University of Texas at Dallas
Correspondent: Click to Email
Gas-phase chemistry of 1,3-Butadiene plasmas and resulting deposited film chemistries are examined. In-situ Fourier Transform Infrared Spectroscopic (FTIR) diagnostics are used to characterize the chemistry at 50 mTorr pressure in continuous and pulsed regimes of the discharge, in an inductively coupled gaseous electronics conference cell. The continuous discharge was examined using a designed experiment with pressure, power, and gas flow being the free parameters. The pulsed discharge was examined at duty cycles ranging from 87 to 3 percent, all acquired at 50 mTorr, 8 sccm, and 60 W (during plasma "on" phase). When the plasma was pulsed with a 50 percent duty, approximately 10 percent of the polymer was broken apart. This increased to approximately 20 percent for the continuous discharge. Ex-situ Attenuated Total Reflectance (ATR) diagnostics are used to study the surface chemistry resulting from plasma deposition of Butadiene on bare silicon substrates under both continuous and pulsed regimes of the discharge, restricted to the same conditions presented above. Surface analysis in the pulsed modes was performed for each individual duty cycle, along with analysis of film grown using combined cycles. FTIR data is cross-correlated against the ATR data to better understand the interactions between plasma induced gas phase and surface chemistry. This work is supported in part by grants from NSF/DOE, CTS-0078669 and NSF, CTS-0079783.